Title :
The MBE Growth And MCP/RIE-based Fabrication Of InGaAs-GaAs MQW Structures For 1047 - 1064 nm S-SEED Arrays
Author :
Stanley, C.R. ; Pottier, F. ; Wilkinson, C.D.W.
Author_Institution :
University of Glasgow
Keywords :
Absorption; Etching; Fabrication; Gallium arsenide; Gold; Logic arrays; Molecular beam epitaxial growth; Quantum well devices; Semiconductor laser arrays; Substrates;
Conference_Titel :
Integrated Optoelectronics, 1994., Proceedings of IEE/LEOS Summer Topical Meetings:
Print_ISBN :
0-7803-1752-1
DOI :
10.1109/LEOSST.1994.700551
