Title :
Applying SEMI E10 guidelines to manufacturing
Author :
Trybula, W.J. ; Pratt, Margaret
Author_Institution :
SEMATECH, Austin, TX, USA
Abstract :
The semiconductor industry has been instrumental in developing a methodology for evaluating the application of information from equipment regarding its operating condition. The development of the SEMI E10 Guidelines provides a means for evaluating the operation of equipment. While the Guidelines were developed for the semiconductor industry, the E10 States can be applied to any phase of modeling. This paper reviews the definition of the various states and how the states can be used to better understand the equipment functions. This paper also presents a cohesive method of developing models that can be used to address various levels of details in the analysis effort
Keywords :
equipment evaluation; semiconductor device manufacture; semiconductor process modelling; SEMI E10 guidelines; analysis effort; cohesive method; equipment operation evaluation; modeling phase; operating condition; semiconductor industry; Costs; Electronics industry; Fabrication; Geometry; Guidelines; Job shop scheduling; Manufacturing; Phase measurement; Production facilities; Semiconductor device manufacture;
Conference_Titel :
Electronics Manufacturing Technology Symposium, 1994. Low-Cost Manufacturing Technologies for Tomorrow's Global Economy. Proceedings 1994 IEMT Symposium., Sixteenth IEEE/CPMT International
Conference_Location :
La Jolla, CA
Print_ISBN :
0-7803-2037-9
DOI :
10.1109/IEMT.1994.404723
