Thermal Characterization of Microliter Amounts of Liquids by a Micromachined Calorimetric Transducer

Author

Pärr, C. ; Santagata-Iervolino, E. ; van Herwaarden, A.W. ; Wien, W. ; Vellekoop, M.J.

Author_Institution

Xensor Integration, Delfgauw

fYear

2009

fDate

25-29 Jan. 2009

Firstpage

535

Lastpage

538

Abstract

We show a simple method of measuring thermal conductivity and thermal diffusivity of liquids. For this we used stacked liquid calorimeter chips fabricated with thin film membranes for optimum thermal isolation of the sample under test. DC joule heating allows measurement of conductivity, AC joule heating allows measurement of diffusivity. We measured the response for iso-propanol (IPA), methanol and water, and water with IPA, methanol and sugar, and the measurement results compare well with the conductivity values. Diffusivity could also be measured.

Keywords

calorimetry; membranes; micromachining; microsensors; organic compounds; thermal conductivity measurement; thermal diffusivity; thin film sensors; AC Joule heating; DC Joule heating; iso-propanol; methanol; micromachined calorimetric transducer; stacked liquid calorimeter chip; thermal characterization; thermal conductivity measurement; thermal diffusivity measurement; thermal isolation; thin film membrane; Biomembranes; Conductivity measurement; Heating; Liquids; Methanol; Semiconductor device measurement; Testing; Thermal conductivity; Transducers; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Conference_Location

Sorrento

ISSN

1084-6999

Print_ISBN

978-1-4244-2977-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2009.4805437

Filename

4805437