Title :
Integration of Bridging-Structural SWNTs on Flexible PDMS Sheet by Stamping Transfer
Author :
Takei, Yusuke ; Kan, Tetsuo ; Iwase, Eiji ; Matsumoto, Kiyoshi ; Shimoyama, Isao
Author_Institution :
Univ. of Tokyo, Tokyo
Abstract :
This paper describes an integration method of bridging-structural single-walled carbon nanotubes (SWNTs) onto the flexible PDMS sheet by stamping transfer. Silicon microstructures and the SWNTs which directly synthesized between the gaps of the microstructures were lifted off by PDMS stamp sheets with high yield (97.8%) and accuracy (position error <100 nm). From the SEM observation of our transferred structures, we confirmed that our method could transfer the bridging-structural SWNTs on to the flexible materials without any damage to the SWNTs´ bridging.
Keywords :
carbon nanotubes; elemental semiconductors; microfabrication; micromechanical devices; polymers; sheet materials; silicon; SEM; bridging-structural single-walled carbon nanotubes; flexible PDMS sheet; silicon microstructures; stamping transfer; Carbon nanotubes; Conducting materials; Conductivity; Electrical resistance measurement; Electrostatic actuators; Gold; Microstructure; Sheet materials; Silicon; Substrates;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805441