DocumentCode :
3044831
Title :
Surface-Temperature Control of Silicon Nanowires in Dry and Liquid Conditions
Author :
Akiyama, Soramichi ; Cheng, Y.T. ; Fattaccioli, J. ; Takama, N. ; Löw, P. ; Bergaud, C. ; Kim, B.J.
Author_Institution :
Inst. of Ind. Sci., Univ. of Tokyo, Tokyo
fYear :
2009
fDate :
25-29 Jan. 2009
Firstpage :
567
Lastpage :
570
Abstract :
In this paper we present the results of surface temperature control of silicon nanowires by using fluorescent thermometry at the nanometer scale. Rhodamine B is one of the stable fluorescent molecules, which rely on the characteristic of temperature-dependent change in fluorescent intensity, and it was used for nano-scale surface temperature sensing interface. The resistive heating on Si nanowires was carried out with applying voltage potential of 6~12 V. Surface-temperature measurement was performed by converting the changes in fluorescent intensity with calibration curve of Rhodamine B. The temperature at the central line along nanowires increasing from 30 degrees to 35~70 degrees was observed.
Keywords :
elemental semiconductors; fluorescence; nanosensors; nanowires; silicon; temperature control; temperature measurement; temperature sensors; thermometers; Rhodamine B; Si; calibration curve; fluorescent molecules; fluorescent thermometry; nano-scale surface temperature sensing interface; resistive heating; silicon nanowires; surface temperature control; temperature 30 degC; temperature 35 degC to 70 degC; voltage 6 V to 12 V; Anisotropic magnetoresistance; Fluorescence; Heating; Industrial control; Nanowires; Probes; Silicon; Temperature control; Temperature measurement; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
ISSN :
1084-6999
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2009.4805445
Filename :
4805445
Link To Document :
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