Title :
Mechanical Response Evaluation of High-Thermally-Stable-Grade Parylene Spring
Author :
Kamezawa, Chihiro ; Suzuki, Yuji ; Kasagi, Nobuhide
Author_Institution :
Dept. of Mech. Eng., The Univ. of Tokyo, Tokyo
Abstract :
Mechanical response of high-thermally-stable-grade parylene (diX-SR/HR) is investigated for flexible spring applications. Pendulum structures with a high-aspect-ratio beam are microfabricated using different parylene materials, and their amplitude and stress at resonant oscillation are measured. Based on fatigue tests and measurements of the temperature coefficient of Young´s modulus, MEMS structures with diX-SR/HR are proved to have better thermal tolerance than parylene-C, while they have almost the same mechanical properties as parylene-C.
Keywords :
Young´s modulus; beams (structures); fatigue testing; microfabrication; micromechanical devices; pendulums; polymers; springs (mechanical); MEMS structures; Young´s modulus; fatigue testing; flexible spring applications; high-aspect-ratio beam; high-thermally-stable-grade parylene spring; pendulum structures; thermal tolerance; Fatigue; Mechanical factors; Mechanical variables measurement; Micromechanical devices; Resonance; Springs; Stress measurement; Temperature measurement; Testing; Thermal stresses;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805457
