• DocumentCode
    3045189
  • Title

    Cellulose-Based Composite as a Raw Material for Flexible and Ultra-Lightweight Mechanical Switch Devices

  • Author

    Couderc, S. ; Kim, B.J. ; Someya, T.

  • Author_Institution
    LIMMS, Univ. of Tokyo, Tokyo
  • fYear
    2009
  • fDate
    25-29 Jan. 2009
  • Firstpage
    646
  • Lastpage
    649
  • Abstract
    This article covers investigations on an original, almost fully biodegradable and flexible mechanical switch device fabricated from cellulose composite. The cellulose films, mainly composed of microfibrils, revealed a high surface roughness and poor dielectric properties making them unsuitable substrates for electronic applications. By coating the cellulose film with a specific polyimide, these drawbacks were overcome. The mechanical switch was operated through the deflection of an electrostatically actuated cantilever beam. Its displacement, induced by the electrostatic force, was validated and the switch ON state detection was performed for an actuation voltage of 55 V and for a beam-substrate distance around 30 mum.
  • Keywords
    beams (structures); biodegradable materials; cantilevers; composite materials; current density; electrostatic actuators; electrostatics; leakage currents; microswitches; polymer films; beam-substrate distance; cantilever beam; cellulose composite; cellulose films; dielectric properties; electrostatic actuation; electrostatic force; leakage current density; microfibrils; polyimide; surface roughness; ultra-lightweight mechanical switch devices; voltage 55 V; Biodegradable materials; Coatings; Dielectric substrates; Electrostatics; Polyimides; Raw materials; Rough surfaces; Structural beams; Surface roughness; Switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
  • Conference_Location
    Sorrento
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-2977-6
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2009.4805465
  • Filename
    4805465