DocumentCode
3045189
Title
Cellulose-Based Composite as a Raw Material for Flexible and Ultra-Lightweight Mechanical Switch Devices
Author
Couderc, S. ; Kim, B.J. ; Someya, T.
Author_Institution
LIMMS, Univ. of Tokyo, Tokyo
fYear
2009
fDate
25-29 Jan. 2009
Firstpage
646
Lastpage
649
Abstract
This article covers investigations on an original, almost fully biodegradable and flexible mechanical switch device fabricated from cellulose composite. The cellulose films, mainly composed of microfibrils, revealed a high surface roughness and poor dielectric properties making them unsuitable substrates for electronic applications. By coating the cellulose film with a specific polyimide, these drawbacks were overcome. The mechanical switch was operated through the deflection of an electrostatically actuated cantilever beam. Its displacement, induced by the electrostatic force, was validated and the switch ON state detection was performed for an actuation voltage of 55 V and for a beam-substrate distance around 30 mum.
Keywords
beams (structures); biodegradable materials; cantilevers; composite materials; current density; electrostatic actuators; electrostatics; leakage currents; microswitches; polymer films; beam-substrate distance; cantilever beam; cellulose composite; cellulose films; dielectric properties; electrostatic actuation; electrostatic force; leakage current density; microfibrils; polyimide; surface roughness; ultra-lightweight mechanical switch devices; voltage 55 V; Biodegradable materials; Coatings; Dielectric substrates; Electrostatics; Polyimides; Raw materials; Rough surfaces; Structural beams; Surface roughness; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location
Sorrento
ISSN
1084-6999
Print_ISBN
978-1-4244-2977-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2009.4805465
Filename
4805465
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