Title :
32kHz MEMS-based oscillator for implantable medical devices
Author :
Chang, Jae-Hong ; Diao, Shengxi ; Kumarasamy, Raja Muthusamy ; Je, Minkyu
Author_Institution :
Integrated Circuits & Syst. Lab., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
A MEMS based high stability 32kHz oscillator for real time clock (RTC) for medical device application using 0.13μm CMOS technology is designed and simulated. This oscillator achieves a power consumption of less than 1μA with 10pF load capacitor, and a functional temperature drift of ± 80ppm with temperature range from -20°C to 60°C.
Keywords :
micromechanical devices; oscillators; prosthetics; CMOS technology; MEMS-based oscillator; capacitance 10 pF; frequency 32 kHz; functional temperature drift; implantable medical devices; real time clock; size 0.13 mum; temperature -20 degC to 60 degC; Electrodes; Micromechanical devices; Oscillators; Resonant frequency; Silicon; Temperature distribution; Tuning; 32kHz; CMOS; Cystal oscillator; Low power; MEMS; Oscillator; RTC; Temperature compensation;
Conference_Titel :
Integrated Circuits (ISIC), 2011 13th International Symposium on
Conference_Location :
Singapore
Print_ISBN :
978-1-61284-863-1
DOI :
10.1109/ISICir.2011.6131942
