DocumentCode
3045192
Title
32kHz MEMS-based oscillator for implantable medical devices
Author
Chang, Jae-Hong ; Diao, Shengxi ; Kumarasamy, Raja Muthusamy ; Je, Minkyu
Author_Institution
Integrated Circuits & Syst. Lab., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
fYear
2011
fDate
12-14 Dec. 2011
Firstpage
246
Lastpage
249
Abstract
A MEMS based high stability 32kHz oscillator for real time clock (RTC) for medical device application using 0.13μm CMOS technology is designed and simulated. This oscillator achieves a power consumption of less than 1μA with 10pF load capacitor, and a functional temperature drift of ± 80ppm with temperature range from -20°C to 60°C.
Keywords
micromechanical devices; oscillators; prosthetics; CMOS technology; MEMS-based oscillator; capacitance 10 pF; frequency 32 kHz; functional temperature drift; implantable medical devices; real time clock; size 0.13 mum; temperature -20 degC to 60 degC; Electrodes; Micromechanical devices; Oscillators; Resonant frequency; Silicon; Temperature distribution; Tuning; 32kHz; CMOS; Cystal oscillator; Low power; MEMS; Oscillator; RTC; Temperature compensation;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Circuits (ISIC), 2011 13th International Symposium on
Conference_Location
Singapore
Print_ISBN
978-1-61284-863-1
Type
conf
DOI
10.1109/ISICir.2011.6131942
Filename
6131942
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