• DocumentCode
    3045326
  • Title

    Visual Observation of PDMS Tip in Liquid Microcontact Printing

  • Author

    Fattaccioli, J. ; Ikeda, A. ; Kim, J.G. ; Takama, N. ; Kim, B.J.

  • Author_Institution
    CNRS-IIS, Univ. of Tokyo, Tokyo
  • fYear
    2009
  • fDate
    25-29 Jan. 2009
  • Firstpage
    681
  • Lastpage
    684
  • Abstract
    Microcontact printing has been shown to be a viable lithographic technique for the fabrication of microstructures, through the deposition of molecules by conformal contact between a surface and an elastomeric stamp. However, the diffusion of the molecules on the substrate and the deformation of the stamp during the contact are severe drawbacks when considering the resolution of the technique. In this paper, we show the effect of the diffusion of the molecules on the size of gold patterns on silicon and we observe in-situ the deformation of the PDMS stamp in liquid and air environment using an interferential microscopy technique.
  • Keywords
    elastomers; gold; nanolithography; nanopatterning; soft lithography; Au; PDMS tip; conformal contact; elastomeric stamp; interferential microscopy technique; liquid microcontact printing; molecule deposition; Adhesives; Fabrication; Glass; Gold; Ink; Interference; Microscopy; Silicon; Soft lithography; Surface reconstruction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
  • Conference_Location
    Sorrento
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-2977-6
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2009.4805474
  • Filename
    4805474