DocumentCode
3045326
Title
Visual Observation of PDMS Tip in Liquid Microcontact Printing
Author
Fattaccioli, J. ; Ikeda, A. ; Kim, J.G. ; Takama, N. ; Kim, B.J.
Author_Institution
CNRS-IIS, Univ. of Tokyo, Tokyo
fYear
2009
fDate
25-29 Jan. 2009
Firstpage
681
Lastpage
684
Abstract
Microcontact printing has been shown to be a viable lithographic technique for the fabrication of microstructures, through the deposition of molecules by conformal contact between a surface and an elastomeric stamp. However, the diffusion of the molecules on the substrate and the deformation of the stamp during the contact are severe drawbacks when considering the resolution of the technique. In this paper, we show the effect of the diffusion of the molecules on the size of gold patterns on silicon and we observe in-situ the deformation of the PDMS stamp in liquid and air environment using an interferential microscopy technique.
Keywords
elastomers; gold; nanolithography; nanopatterning; soft lithography; Au; PDMS tip; conformal contact; elastomeric stamp; interferential microscopy technique; liquid microcontact printing; molecule deposition; Adhesives; Fabrication; Glass; Gold; Ink; Interference; Microscopy; Silicon; Soft lithography; Surface reconstruction;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location
Sorrento
ISSN
1084-6999
Print_ISBN
978-1-4244-2977-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2009.4805474
Filename
4805474
Link To Document