DocumentCode :
3045326
Title :
Visual Observation of PDMS Tip in Liquid Microcontact Printing
Author :
Fattaccioli, J. ; Ikeda, A. ; Kim, J.G. ; Takama, N. ; Kim, B.J.
Author_Institution :
CNRS-IIS, Univ. of Tokyo, Tokyo
fYear :
2009
fDate :
25-29 Jan. 2009
Firstpage :
681
Lastpage :
684
Abstract :
Microcontact printing has been shown to be a viable lithographic technique for the fabrication of microstructures, through the deposition of molecules by conformal contact between a surface and an elastomeric stamp. However, the diffusion of the molecules on the substrate and the deformation of the stamp during the contact are severe drawbacks when considering the resolution of the technique. In this paper, we show the effect of the diffusion of the molecules on the size of gold patterns on silicon and we observe in-situ the deformation of the PDMS stamp in liquid and air environment using an interferential microscopy technique.
Keywords :
elastomers; gold; nanolithography; nanopatterning; soft lithography; Au; PDMS tip; conformal contact; elastomeric stamp; interferential microscopy technique; liquid microcontact printing; molecule deposition; Adhesives; Fabrication; Glass; Gold; Ink; Interference; Microscopy; Silicon; Soft lithography; Surface reconstruction;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
ISSN :
1084-6999
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2009.4805474
Filename :
4805474
Link To Document :
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