Analyses on output signal of MEMS gyroscope applied to low speed rotating carrier

MEMS gyroscope can be sensitive to the rotational angular velocity only after being driven to build upon the initial carrier of vibration. Non-driven silicon micro-mechanical gyroscope uses rotating carrier to generate its own rotating as the driving, but this characteristic is not suitable for low-speed rotating objects. The paper proposes solutions for this shortcoming, which is using micro motor as rotating carrier of non-driven silicon micro-mechanical gyroscope to generate gyroscopic effect which is sensitive to the attitude information, including rolling rate, yaw angular rate and pitch angular rate of low-speed rotating or non-rotating objects. Moreover, by analysing the output signals using Fast Fourier Transform(FFT) algorithm, some rules of output signals of gyroscope are gained based on simulation the low rotating object experiments of three-axis moving of MEMS.