Title :
Design and fabrication of configurable digital controller interface for micro mirror projector ASIC
Author :
Luo, Jianwen ; Li, Peng ; Pang, Chin Yann ; Gopalakrishnan, Pradeep Kumar ; Langer, Tal ; Je, Minkyu
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
This paper presents the design and implementation of digital interface for micro mirror projection ASIC for MEMS scanner control and sensing. The design includes a microprocessor for sensor configuration, MEMS control registers access and video interface for providing scanning and synchronizing signals. It has been fabricated on 0.18μm high voltage CMOS process, and silicon proves the full functionality of the design concept.
Keywords :
CMOS digital integrated circuits; application specific integrated circuits; digital control; display devices; microcontrollers; microfabrication; micromirrors; microsensors; MEMS control registers; MEMS scanner control; MEMS sensing; configurable digital controller interface design; configurable digital controller interface fabrication; micromirror projector ASIC; size 0.18 mum; video interface; voltage CMOS process; Micromechanical devices; Mirrors; Nonvolatile memory; Random access memory; Registers; Streaming media; Synchronization;
Conference_Titel :
Integrated Circuits (ISIC), 2011 13th International Symposium on
Conference_Location :
Singapore
Print_ISBN :
978-1-61284-863-1
DOI :
10.1109/ISICir.2011.6131979
