Design and Implementation of a Novel CMOS-MEMS Single Proof-Mass Tri-Axis Accelerometer

Author

Sun, Chih-Ming ; Tsai, Ming-Han ; Fang, Weileun

Author_Institution

Nanoengineering & Microsyst. Inst., Nat. Tsing Hua Univ., Hsinchu

fYear

2009

fDate

25-29 Jan. 2009

Firstpage

809

Lastpage

812

Abstract

This study presents a novel single proof-mass tri-axis capacitive CMOS MEMS accelerometer to reduce the footprint of chip. A serpentine out-of-plane (Z-axis) spring is designed to reduce cross-axis error. A magnetic actuation for Z-axis self-test is also presented. The tri-axis accelerometer has been successfully implemented using TSMC 2P4M process and our in-house post-process. Measurement results show that sensitivities (non-linearity) of etch direction are 0.53mV/G (2.64%) of X-axis, 0.28mV/G (3.15%) of Y-axis, and 0.2mV/G (3.36%) of Z-axis. The cross-axis sensitivities range from 1% to 8.3%, and the measurement range is between 0.8~6G, respectively.

Keywords

accelerometers; electromagnetic actuators; microsensors; CMOS-MEMS single proof-mass tri-axis accelerometer; magnetic actuation; Accelerometers; Built-in self-test; CMOS process; CMOS technology; Capacitance; Electrodes; Games; Micromachining; Micromechanical devices; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Conference_Location

Sorrento

ISSN

1084-6999

Print_ISBN

978-1-4244-2977-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2009.4805506

Filename

4805506