DocumentCode
3045991
Title
Air Pressure Sensor for an Insect Wing
Author
Takahashi, Hidetoshi ; Matsumoto, Kiyoshi ; Shimoyama, Isao
Author_Institution
Univ. of Tokyo, Tokyo
fYear
2009
fDate
25-29 Jan. 2009
Firstpage
825
Lastpage
828
Abstract
This paper reports on an air pressure sensor for the measurement of the aerodynamic force on an insect wing. A piezoresistive cantilever was fabricated as a pressure sensor. The size of the cantilever was 250 mum times 200 mum times 0.3 mum. The sensitivity to air pressure was 0.29 times 10-3 Pa-1 below 2.0 kHz. By attaching the sensors on the prototype of an insect wing, pressure distribution over the surface were measured when the flow was both steady and unsteady.
Keywords
aerodynamics; cantilevers; force measurement; microsensors; piezoresistive devices; pressure measurement; pressure sensors; aerodynamic force measurement; air pressure sensor; insect wing; micro pressure sensor; piezoresistive cantilever fabrication; pressure distribution; size 0.3 mum; size 200 mum; size 250 mum; Aerodynamics; Etching; Force measurement; Force sensors; Gold; Insects; Piezoresistance; Pressure measurement; Sensor arrays; Silicon on insulator technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location
Sorrento
ISSN
1084-6999
Print_ISBN
978-1-4244-2977-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2009.4805510
Filename
4805510
Link To Document