Title :
Air Pressure Sensor for an Insect Wing
Author :
Takahashi, Hidetoshi ; Matsumoto, Kiyoshi ; Shimoyama, Isao
Author_Institution :
Univ. of Tokyo, Tokyo
Abstract :
This paper reports on an air pressure sensor for the measurement of the aerodynamic force on an insect wing. A piezoresistive cantilever was fabricated as a pressure sensor. The size of the cantilever was 250 mum times 200 mum times 0.3 mum. The sensitivity to air pressure was 0.29 times 10-3 Pa-1 below 2.0 kHz. By attaching the sensors on the prototype of an insect wing, pressure distribution over the surface were measured when the flow was both steady and unsteady.
Keywords :
aerodynamics; cantilevers; force measurement; microsensors; piezoresistive devices; pressure measurement; pressure sensors; aerodynamic force measurement; air pressure sensor; insect wing; micro pressure sensor; piezoresistive cantilever fabrication; pressure distribution; size 0.3 mum; size 200 mum; size 250 mum; Aerodynamics; Etching; Force measurement; Force sensors; Gold; Insects; Piezoresistance; Pressure measurement; Sensor arrays; Silicon on insulator technology;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805510
