A Fully CMOS-Compatible Micro-Pirani Gauge based on a Constant Current

Author

Wang, Jiaqi ; Tang, Zhenan

Author_Institution

Dept. of Electron. Eng., Dalian Univ. of Technol., Dalian

fYear

2009

fDate

25-29 Jan. 2009

Firstpage

829

Lastpage

832

Abstract

The paper presents a CMOS-compatible micro-Pirani sensor which consists of the tungsten micro-hotplate and the constant current circuit based on the operational amplifier. The advantage of the constant current circuit for the micro-Pirani sensor is that it is more sensitive than the constant temperature one in the low gas pressure. The micro-Pirani system is implemented in an industrial 0.5-mum CMOS process. The measurement results show that the designed micro-Pirani sensor has a good response to the gas pressure, especially in the low gas pressure ranging from 1 Pa to 100 Pa, the sensitivity of the sensor is 0.23 mV/Pa and the linearity is 4.95%.

Keywords

CMOS integrated circuits; electric heating; operational amplifiers; tungsten; vacuum gauges; CMOS process; CMOS-compatible microPirani sensor; W; constant current circuit; gas pressure; microPirani system; microhotplate; operational amplifier; size 0.1 mum; vacuum sensor; Aluminum; Bonding; CMOS process; Circuits; Gas detectors; Plugs; Pressure measurement; Sputter etching; Temperature sensors; Tungsten;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Conference_Location

Sorrento

ISSN

1084-6999

Print_ISBN

978-1-4244-2977-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2009.4805511

Filename

4805511