DocumentCode
3046049
Title
High Speed (GHz), Ultra-High Pressure (GPA) Sensor Array Fabricated in Integrated CMOS+MEMS Process
Author
Okandan, Murat ; Olsson, Roy ; Baker, Michael ; Resnick, Paul ; Hill, Thomas A. ; Lackey, Chad ; Pearson, Sean ; Castaneda, Jaime ; Trott, Wayne ; Jones, David
Author_Institution
Sandia Nat. Labs., Albuquerque, NM
fYear
2009
fDate
25-29 Jan. 2009
Firstpage
845
Lastpage
847
Abstract
In order to observe and quantify pressure levels generated during testing of energetic materials, a sensor array with high temporal resolution (~1 ns) and extremely high pressure range (> 1 GPa) is needed. We have developed such a sensor array which utilizes a novel integrated high performance CMOS+MEMS process.
Keywords
CMOS integrated circuits; detector circuits; microsensors; pressure sensors; sensor arrays; energetic materials; high speed ultrahigh pressure sensor array; integrated CMOS-MEMS process; Aluminum nitride; CMOS process; Capacitive sensors; Circuits; Electrodes; Etching; Fabrication; Mechanical sensors; Sensor arrays; Tungsten;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location
Sorrento
ISSN
1084-6999
Print_ISBN
978-1-4244-2977-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2009.4805515
Filename
4805515
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