Title :
Suspended Membrane Single Crystal Silicon Micro Hotplate for Differential Scanning Calorimetry
Author :
Lee, J. ; Spadaccini, C.M. ; Mukerjee, E.V. ; King, W.P.
Author_Institution :
Univ. of Illinois at Urbana-Champaign, Champaign, IL
Abstract :
This paper introduces an array of single crystal silicon micro hotplates for differential scanning calorimetry. Based on heat transfer analysis considering tradeoffs between response time, temperature uniformity, and measurement sensitivity, suspended membrane micro hotplates with full backside release were found to be optimal designs. Due to the requirements of routine sample loading, the size of the heater is 100 or 200 mum while the size of the backside membrane cavity is 400 mum. Our design achieves a combination of time constant, temperature sensitivity, and heating efficiency that are comparable or superior to previously reported microcalorimeters.
Keywords :
differential scanning calorimetry; differential thermal analysis; electric heating; backside membrane cavity; differential scanning calorimetry; heat transfer analysis; heating efficiency; measurement sensitivity; microcalorimeters; response time; routine sample loading; single crystal silicon micro hotplates; size 100 mum; size 200 mum; size 400 mum; suspended membrane micro hotplates; temperature sensitivity; temperature uniformity; Biomembranes; Calorimetry; Delay; Dielectric thin films; Heating; Polymer films; Semiconductor device measurement; Silicon; Temperature measurement; Temperature sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805517