Low Actuation Voltage SPDT RF MEMS K Band Switch using a Single Gold Membrane

Author

Robin, R. ; Millet, O. ; Segueni, K. ; Buchaillot, L.

Author_Institution

DelfMEMS SAS, Villeneuve-d´´Ascq

fYear

2009

fDate

25-29 Jan. 2009

Firstpage

872

Lastpage

875

Abstract

This paper presents a SPDT (single pole double throw) system for K band applications using RF MEMS (radio-frequency microelectromechanical systems) switch. The switch is based on a single anchorless gold membrane which is simply supported. It achieves large deflections of 4 mum at a low actuaction voltage (7.5 V simulated and 12 V demonstrated) and with a high reliability. New mechanical testing results, showing good agreements with simulations, and RF measurements of the structure, using a wide band coplanar waveguides (CPW) to microstrip (MS) transition, will be shown.

Keywords

coplanar waveguides; mechanical testing; microstrip transitions; microswitches; RF measurements; low actuation voltage SPDT RF MEMS K-band switch; mechanical testing; microstrip transition; radio-frequency microelectromechanical systems switch; single anchorless gold membrane; single pole double throw system; wide band coplanar waveguide; Biomembranes; Coplanar waveguides; Gold; Low voltage; Mechanical variables measurement; Microelectromechanical systems; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Conference_Location

Sorrento

ISSN

1084-6999

Print_ISBN

978-1-4244-2977-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2009.4805522

Filename

4805522