Title :
Chaos in Electrostatically Actuated RF-MEMS Measured and Modeled
Author :
Stulemeijer, J. ; Herfst, R.W. ; Bielen, J.A.
Author_Institution :
Epcos SAW, Nijmegen
Abstract :
Observation of period doubling bifurcations and chaos in electrostatically actuated RF-MEMS are reported in this paper for the first time. Period doubling, quadrupling and chaotic motion can clearly be observed in the measurement data. A 1D nonlinear device model is fitted to the capacitance versus voltage (C-V) curves and mechanical resonance curve data. The features of the observed bifurcation diagram have been reproduced with the 1D model.
Keywords :
bifurcation; electrostatic actuators; 1D nonlinear device; RF-MEMS; chaotic motion; electrostatic actuators; mechanical resonance; period doubling bifurcations; quadrupling motion; Bifurcation; Capacitance; Capacitance-voltage characteristics; Chaos; Electrostatic measurements; Force measurement; Frequency; Radiofrequency microelectromechanical systems; Resonance; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805534
