Thermoelastic FEM-BEM Model for MEMS Resonator Simulation

Minimization of dissipative losses is a major goal in MEMS resonator design [1]-[2]. For an accurate simulation of a MEMS resonator vibrating in vacuum, thermoelastic damping phenomenon related to the irreversible heat dissipation induced by the coupling between heat transfer and strain rate during the resonator vibration and acoustic radiation into the substrate have to be taken into account. The finite element method (FEM) is suitable for structural simulation, especially for thermoelastic damped structures vibrating in vacuum. When the vibrating structure is deposited on an unbounded elastic medium, radiating conditions have to be taken into account. The boundary element method (BEM) is suitable for unbounded medium, because the radiating conditions are exact. It is often used to complete of the finite element method. The goal of our work is to develop and to validate a thermal-electromechanical FEM-BEM tool, which is helpful to predict and understand MEMS energy loss dissipation.