Title :
Polymeric (SU-8) Optical Microscanner Driven by Electrostatic Actuation
Author :
Lee, S.K. ; Kim, M.G. ; An, J.Y. ; Jun, M.H. ; Yang, S. ; Lee, J.H.
Author_Institution :
Sch. of Inf. & Mechatron., Gwangju Inst. of Sci. & Technol. (GIST), Gwangju
Abstract :
A torsional micromechanical scanner was fabricated using photosensitive polymer (SU-8). The scanner consists of two parts; top layer (micro mirror) and bottom layer (an anchor and electrodes). The SU-8 scanner is actuated by electrostatic force generated from the gap-closing electrodes. For the fabricated optical scanner with the mirror area of 3times3 mm2, the experimentally determined scanning angles were 0.85deg and 3.1deg for 60 Hz (non-resonant) and 1.13 kHz (resonant) driving frequencies, respectively, at an input voltage of 160 V. A polymer-based actuator offers advantages including a low-cost fabrication process and low frequency operation.
Keywords :
electrodes; electrostatic actuators; micromirrors; optical scanners; polymers; SU-8 scanner; electrostatic actuation; electrostatic force; gap-closing electrodes; micromirror; optical microscanner; photosensitive polymer; polymer-based actuator; torsional micromechanical scanner; Electrodes; Electrostatic actuators; Fabrication; High speed optical techniques; Micromechanical devices; Mirrors; Optical devices; Optical polymers; Silicon; Springs;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805543
