Polymeric (SU-8) Optical Microscanner Driven by Electrostatic Actuation

Author

Lee, S.K. ; Kim, M.G. ; An, J.Y. ; Jun, M.H. ; Yang, S. ; Lee, J.H.

Author_Institution

Sch. of Inf. & Mechatron., Gwangju Inst. of Sci. & Technol. (GIST), Gwangju

fYear

2009

fDate

25-29 Jan. 2009

Firstpage

955

Lastpage

958

Abstract

A torsional micromechanical scanner was fabricated using photosensitive polymer (SU-8). The scanner consists of two parts; top layer (micro mirror) and bottom layer (an anchor and electrodes). The SU-8 scanner is actuated by electrostatic force generated from the gap-closing electrodes. For the fabricated optical scanner with the mirror area of 3times3 mm², the experimentally determined scanning angles were 0.85deg and 3.1deg for 60 Hz (non-resonant) and 1.13 kHz (resonant) driving frequencies, respectively, at an input voltage of 160 V. A polymer-based actuator offers advantages including a low-cost fabrication process and low frequency operation.

Keywords

electrodes; electrostatic actuators; micromirrors; optical scanners; polymers; SU-8 scanner; electrostatic actuation; electrostatic force; gap-closing electrodes; micromirror; optical microscanner; photosensitive polymer; polymer-based actuator; torsional micromechanical scanner; Electrodes; Electrostatic actuators; Fabrication; High speed optical techniques; Micromechanical devices; Mirrors; Optical devices; Optical polymers; Silicon; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on

Conference_Location

Sorrento

ISSN

1084-6999

Print_ISBN

978-1-4244-2977-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2009.4805543

Filename

4805543