Title :
Tilted Paraboloidal Reflective Lens for Far Infrared Sensor Fabricated by Mask with Rectangular Openings
Author :
Takahata, Tomoyuki ; Matsumoto, Kiyoshi ; Shimoyama, Isao
Author_Institution :
Univ. of Tokyo, Tokyo
Abstract :
A tilted paraboloidal reflective lens for focusing far infrared (FIR) rays has been devised. Tilted paraboloids with smooth surface and vertical walls were fabricated by two-step etching using microloading effect with a mask which had rectangular openings of various sizes. FIR light was focused by a 30-degree-tilted paraboloid lens. The size of a real image of an FIR source was 110 mum, which agrees with a lens formula.
Keywords :
etching; infrared detectors; lenses; masks; far infrared rays; far infrared sensor; mask; microloading effect; rectangular openings; tilted paraboloidal reflective lens; two-step etching; Etching; Finite impulse response filter; Focusing; Infrared sensors; Lenses; Resists; Rough surfaces; Sensor arrays; Silicon; Surface roughness;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805548
