DocumentCode
3046694
Title
High power command charging circuit for high repetition rated laser
Author
Okamura, K. ; Watanabe, Y. ; Takagi, S. ; Yokokura, K. ; Ohshima, I.
Author_Institution
Toshiba Corp., Tokyo, Japan
fYear
1990
fDate
26-28 Jun 1990
Firstpage
153
Lastpage
154
Abstract
A high-power command charging power supply for a high repetition rated excimer laser which has a thyratron main switch was designed and tested, GTOs are used as output devices. The design goal of this power supply was to attain a repetition rate of 5 kHz and output power of 67.5 kW. At the present time, up to 4 kHz and 20 kW have been attained; these values are limited mainly by the capacity of the thyratron switching device
Keywords
excimer lasers; laser accessories; power supplies to apparatus; pulse generators; pulsed power technology; switchgear; switching; thyratrons; 20 kW; 4 kHz; 5 kHz; 67.5 kW; charging circuit; design; excimer laser; power supply; pulsed power; repetition rate; switchgear, GTO; switching; thyratron main switch; thyristors; Capacitance; Capacitors; Circuits; Frequency; Power lasers; Power supplies; Snubbers; Surges; Thyratrons; Thyristors;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Modulator Symposium, 1990., IEEE Conference Record of the 1990 Nineteenth
Conference_Location
San Diego, CA
Type
conf
DOI
10.1109/MODSYM.1990.201049
Filename
201049
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