Title :
High power command charging circuit for high repetition rated laser
Author :
Okamura, K. ; Watanabe, Y. ; Takagi, S. ; Yokokura, K. ; Ohshima, I.
Author_Institution :
Toshiba Corp., Tokyo, Japan
Abstract :
A high-power command charging power supply for a high repetition rated excimer laser which has a thyratron main switch was designed and tested, GTOs are used as output devices. The design goal of this power supply was to attain a repetition rate of 5 kHz and output power of 67.5 kW. At the present time, up to 4 kHz and 20 kW have been attained; these values are limited mainly by the capacity of the thyratron switching device
Keywords :
excimer lasers; laser accessories; power supplies to apparatus; pulse generators; pulsed power technology; switchgear; switching; thyratrons; 20 kW; 4 kHz; 5 kHz; 67.5 kW; charging circuit; design; excimer laser; power supply; pulsed power; repetition rate; switchgear, GTO; switching; thyratron main switch; thyristors; Capacitance; Capacitors; Circuits; Frequency; Power lasers; Power supplies; Snubbers; Surges; Thyratrons; Thyristors;
Conference_Titel :
Power Modulator Symposium, 1990., IEEE Conference Record of the 1990 Nineteenth
Conference_Location :
San Diego, CA
DOI :
10.1109/MODSYM.1990.201049
