Title :
Multichamber Tunable Liquid Microlenses with Active Aberration Correction
Author :
Mader, D. ; Waibel, P. ; Seifert, A. ; Zappe, H.
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg
Abstract :
A design approach and new manufacturing technique for a novel type of stacked fluidic multi-chamber tunable lenses is presented. The design offers flexibility and extensibility, leading to fully functional miniature tunable optical lens systems with the ability for low order aberration control.
Keywords :
aberrations; microfluidics; microlenses; active aberration correction; low order aberration control; multichamber tunable liquid microlenses; optical lens; stacked fluidic multichamber tunable lenses; Biomembranes; Equations; Error correction; Glass; Lenses; Microoptics; Optical imaging; Optical polymers; Optical refraction; Optical variables control;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805552
