Title :
CMOS-Integrable Piston-Type Micro-Mirror Array for Adaptive Optics Made of Mono-Crystalline Silicon using 3-D Integration
Author :
Lapisa, Martin ; Zimmer, Fabian ; Niklaus, Frank ; Gehner, Andreas ; Stemme, Göran
Author_Institution :
Sch. of Electr. Eng., R. Inst. of Technol. (KTH), Stockholm
Abstract :
This paper presents a novel CMOS-compatible fabrication process and evaluations of a micro mirror array (MMA) made of mono-crystalline silicon (m-Si) for adaptive optic (AO) applications. The m-Si mirror layer is transfer bonded from a silicon-on-insulator (SOI) donor wafer with adhesive wafer bonding towards an intermediate patterned polymer spacer layer and clamped with metal plating. We present a CMOS compatible, bond alignment-free fabrication scheme offering the potential for high air gap distances between substrate and mirrors and we show first measurements of the fabricated mirrors.
Keywords :
CMOS integrated circuits; adaptive optics; adhesive bonding; elemental semiconductors; integrated optoelectronics; micromirrors; optical fabrication; silicon; wafer bonding; CMOS-compatible fabrication process; Si; adaptive optic applications; adhesive wafer bonding; metal plating; micromirror array; monocrystalline silicon; patterned polymer spacer layer; silicon-on-insulator donor wafer; Adaptive arrays; Adaptive optics; CMOS process; Electrodes; Mirrors; Optical arrays; Optical device fabrication; Silicon; Surface topography; Wafer bonding;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805556
