Title :
CMOS-Compatible 2-Axis Self-Aligned Vertical Comb-Driven Micromirror for Large Field-of-View Microendoscopes
Author :
Kumar, K. ; Zhang, X.J.
Author_Institution :
Dept. of Biomed. Eng., Univ. of Texas at Austin, Austin, TX
Abstract :
A CMOS-compatible 3-mask process for 2-axis self-aligned vertical comb-driven micromirror fabrication is described. Our 1024 mum diameter mirrors exhibit resonance at 2.81kHz, 669Hz, and maximum scan angles of 22deg, 12deg and 5.0deg, 4.5deg for resonant and static voltage operation on inner and outer axes. Reflectance confocal images of USAF1951 resolution target and epithelial breast tissue obtained at 3.0fps with 0.49mum, 4.18mum lateral and axial resolution over 200times125mum field of view indicate the potential of these devices for large field-of-view microendoscopes.
Keywords :
CMOS image sensors; bioMEMS; biological tissues; biomedical optical imaging; endoscopes; mammography; micromirrors; CMOS compatible 3 mask process; comb driven micromirror; epithelial breast tissue; frequency 2.81 kHz; frequency 669 Hz; microendoscopes; micromirror fabrication; reflectance confocal images; resonant voltage; size 1024 mum; static voltage; Etching; Fabrication; In vivo; Lenses; Micromechanical devices; Micromirrors; Optical imaging; Optical sensors; Silicon compounds; Stators;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805558
