Photocathode based on deuterated diamond like carbon films prepared by reactive magnetron sputtering and PECVD technology

Author

Huran, Jozef ; Balalykin, Nikolay I. ; Kadlecikova, M. ; Zat´ko, B. ; Feschenko, Alexandr A. ; Kobzev, Alexander P. ; Vanco, L. ; Nozdrin, Mikhail A. ; Kleinova, Angela ; Kovacova, E.

Author_Institution

Inst. of Electr. Eng., Bratislava, Slovakia

fYear

2012

fDate

11-15 Nov. 2012

Firstpage

263

Lastpage

266

Abstract

The influence of deuterated diamond like carbon films technology and properties on quantum efficiency of prepared photocathode has been investigated. Deuterated diamond like carbon films were deposited on silicon substrate and stainless steel mesh by PECVD from gas mixture CH₄ and D₂ and reactive magnetron sputtering using carbon target and gas mixture Ar and D₂. The concentration of elements in films was determined by RBS and ERD. Chemical compositions were analyzed by FT-IR. Raman spectroscopy at visible excitation wavelength was used for I(D)/I(G) ratio determination. The quantum efficiency was calculated from the measured laser energy and the measured cathode charge.

Keywords

Fourier transform spectra; Raman spectra; Rutherford backscattering; diamond-like carbon; infrared spectra; photocathodes; plasma CVD; spectrochemical analysis; sputter deposition; thin film devices; C; ERD; FTIR spectroscopy; PECVD technology; RBS; Raman spectroscopy; Si; carbon target; cathode charge; chemical compositions; deuterated diamond like carbon films technology; gas mixture; laser energy; photocathode; quantum efficiency; reactive magnetron sputtering; silicon substrate; stainless steel mesh; visible excitation wavelength; Cathodes; Diamond-like carbon; Magnetic films; Measurement by laser beam; Silicon; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Devices & Microsystems (ASDAM), 2012 Ninth International Conference on

Conference_Location

Smolenice

Print_ISBN

978-1-4673-1197-7

Type

conf

DOI

10.1109/ASDAM.2012.6418517

Filename

6418517