DocumentCode
3046917
Title
Application of single-crystal CVD diamond and SiC detectors for diagnostics of ion emission from laser plasmas
Author
Ryc, L. ; Calcagno, L. ; Dubecky, F. ; Margarone, D. ; Nowak, T. ; Parys, Piotr ; Pfeifer, Miroslav ; Riesz, F. ; Torrisi, Lorenzo
Author_Institution
Inst. of Plasma Phys. & Laser Microfusion, Warsaw, Poland
fYear
2012
fDate
11-15 Nov. 2012
Firstpage
255
Lastpage
258
Abstract
The application of single-crystal CVD diamond and SiC detectors for the measurement of ions generated from laser-produced plasmas is reported. It was found that detectors are mostly sensitive to fast ions and protons. Optimization of the diagnostic system based on the detectors is discussed.
Keywords
chemical vapour deposition; diamond; optimisation; plasma CVD; plasma diagnostics; plasma light propagation; semiconductor counters; silicon compounds; wide band gap semiconductors; C; SiC; diagnostic system; ion emission diagnostics; ion generation; laser-produced plasmas; optimization; protons; single-crystal CVD diamond detectors; Detectors; Diamonds; Measurement by laser beam; Plasma measurements; Plasmas; Semiconductor device measurement; Silicon carbide;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices & Microsystems (ASDAM), 2012 Ninth International Conference on
Conference_Location
Smolenice
Print_ISBN
978-1-4673-1197-7
Type
conf
DOI
10.1109/ASDAM.2012.6418519
Filename
6418519
Link To Document