Title :
Application of single-crystal CVD diamond and SiC detectors for diagnostics of ion emission from laser plasmas
Author :
Ryc, L. ; Calcagno, L. ; Dubecky, F. ; Margarone, D. ; Nowak, T. ; Parys, Piotr ; Pfeifer, Miroslav ; Riesz, F. ; Torrisi, Lorenzo
Author_Institution :
Inst. of Plasma Phys. & Laser Microfusion, Warsaw, Poland
Abstract :
The application of single-crystal CVD diamond and SiC detectors for the measurement of ions generated from laser-produced plasmas is reported. It was found that detectors are mostly sensitive to fast ions and protons. Optimization of the diagnostic system based on the detectors is discussed.
Keywords :
chemical vapour deposition; diamond; optimisation; plasma CVD; plasma diagnostics; plasma light propagation; semiconductor counters; silicon compounds; wide band gap semiconductors; C; SiC; diagnostic system; ion emission diagnostics; ion generation; laser-produced plasmas; optimization; protons; single-crystal CVD diamond detectors; Detectors; Diamonds; Measurement by laser beam; Plasma measurements; Plasmas; Semiconductor device measurement; Silicon carbide;
Conference_Titel :
Advanced Semiconductor Devices & Microsystems (ASDAM), 2012 Ninth International Conference on
Conference_Location :
Smolenice
Print_ISBN :
978-1-4673-1197-7
DOI :
10.1109/ASDAM.2012.6418519
