A Multiple Degrees of Freedom Electrothermal Actuator for a Versatile MEMS Gripper

In this paper, we present a versatile MEMS gripper capable of two-dimensional manipulation. This is accomplished by a multiple degrees of freedom electrothermal actuator which can achieve independent in-plane and out-of-plane motions. The device is fabricated with the MetalMUMPs process, which offers silicon nitride, polysilicon, and nickel as the major structural materials. The electrothermal actuator achieves large movement. The in-plane and out-of-plane tip displacements are 83.7 mum at 0.6 V and 98 mum at 87.2 V, respectively.