Title :
Low-Resonant-Frequency Micro Electret Generator for Energy Harvesting Application
Author :
Edamoto, M. ; Suzuki, Y. ; Kasagi, N. ; Kashiwagi, K. ; Morizawa, Y. ; Yokoyama, T. ; Seki, T. ; Oba, M.
Author_Institution :
Dept. of Mech. Eng., Univ. of Tokyo, Tokyo
Abstract :
A vibration-driven electret generator has been developed for energy harvesting applications. By using parylene as the spring material, a low-resonant-frequency MEMS generator is realized. Electrostatic levitation is adopted for the gap control. Large in-plane amplitude of 0.5 mm at the resonant frequency as low as 21 Hz has been achieved. We also demonstrate electret-powered operation of LED using a low-power-consumption impedance conversion circuit.
Keywords :
electrets; electric generators; low-power electronics; micromechanical devices; LED; MEMS generator; electrostatic levitation; energy harvesting application; gap control; in-plane amplitude; low-power-consumption impedance conversion circuit; low-resonant-frequency microelectret generator; size 0.5 mm; vibration-driven electret generator; Circuits; Electrets; Electrodes; Electrostatics; Etching; Glass; Power generation; Resonant frequency; Springs; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805569
