Abstract :
The following topics are dealt with: microprocesses; nanotechnology; lithography; nanomaterials; resist materials and processing; nanodevices; nanofabrication; nano-tools; microsystem technology; MEMS; nanoimprint technology; bioMEMS; lab-on-a-chip; and nanomechanical systems.
Keywords :
bioMEMS; lab-on-a-chip; lithography; nanostructured materials; nanotechnology; resists; MEMS; bioMEMS; lab-on-a-chip; lithography; microprocesses; microsystem technology; nanodevices; nanofabrication; nanoimprint technology; nanomaterials; nanomechanical systems; nanotechnology; nanotools; resist materials; resist processing;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456066
