Title :
Performance characterization of a bulk micromachined gyroscope working at atmosphere
Author :
Zhang, Xia ; Zheng, Xu-dong ; Hu, Shi-chang ; Wang, Hao ; Jin, Zhong-he
Author_Institution :
Dept. of Inf. Sci. & Electron. Eng., Zhejiang Univ., Hangzhou, China
Abstract :
A bulk micromachined gyroscope fabricated with an improved process flow is measured systematically. It achieves good performance at atmosphere. The driving resonant frequency is 1663.5Hz with a quality factor 195, and the sensing resonant frequency is 1677Hz with a quality factor 200. The R2-nonlinearity is 0.008% within the range of ±43°/s, which is limited by the digital to analogue converter, with a scale factor of 42.17mV/°/s. The scale factor is reduced to 7.4mV/°/s to perform linear test within a larger range, and the R2-nonlinearity is 0.032% within ±200°/s. The bias stability is 19.55°/h and the measured noise floor is 0.0125°/s/√Hz at 1Hz.
Keywords :
gyroscopes; micromachining; atmosphere; bulk micromachined gyroscope; performance characterization; process flow; Atmosphere; Gyroscopes; Noise; Prototypes; Resonant frequency; Sensors; Stability analysis;
Conference_Titel :
Systems and Control in Aeronautics and Astronautics (ISSCAA), 2010 3rd International Symposium on
Conference_Location :
Harbin
Print_ISBN :
978-1-4244-6043-4
Electronic_ISBN :
978-1-4244-7505-6
DOI :
10.1109/ISSCAA.2010.5633470