DocumentCode
3047195
Title
Acoustic wave sensor system design consideration
Author
Laposa, A. ; Majer, M. ; Husak, M.
Author_Institution
Dept. of Microelectron., Czech Tech. Univ. in Prague, Prague, Czech Republic
fYear
2012
fDate
11-15 Nov. 2012
Firstpage
315
Lastpage
318
Abstract
In this paper, we present the development and considerations of simple acoustic wave chemical sensors. These sensors can be used for identifying environmental contaminants in large applications scale. Various finite element models of a Acoustic Wave sensors are developed using CoventorWare and 3D analysis is performed on the devices to study the acoustic wave propagation and characterize the device. The effects of the various interdigital transducers (IDT) design; intermediate layer on the propagation characteristics is also investigated.
Keywords
acoustic transducers; acoustic wave propagation; chemical sensors; finite element analysis; 3D analysis; CoventorWare; IDT design; acoustic wave chemical sensors; acoustic wave propagation; environmental contaminants; finite element models; interdigital transducer design; Chemicals; Gas detectors; Oscillators; Piezoelectric transducers; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices & Microsystems (ASDAM), 2012 Ninth International Conference on
Conference_Location
Smolenice
Print_ISBN
978-1-4673-1197-7
Type
conf
DOI
10.1109/ASDAM.2012.6418534
Filename
6418534
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