Title :
Passivated Electrode Actuator with Stable Resonance Amplitude
Author :
Bahl, G. ; Walmsley, R.G. ; DeMartini, B.E. ; Turner, K.L. ; Hartwell, P.G.
Author_Institution :
Stanford Univ., Stanford, CA
Abstract :
In this paper we demonstrate how parametric resonant excitation of a surface drive actuator with dielectric coated electrodes makes the response amplitude independent of the driving force. This behavior can be beneficially utilized to maintain constant excitation amplitude in spite of time-varying charge screening on dielectric passivated electrodes and the associated actuation force decay. Such operation makes the device suitable for applications where constant amplitude operation is critical, such as driving vibratory rate gyroscopes.
Keywords :
electric actuators; electrodes; passivation; actuation force decay; dielectric coated electrodes; driving vibratory rate gyroscopes; parametric resonant excitation; passivated electrode actuator; stable resonance amplitude; surface drive actuator; time-varying charge screening; Actuators; Coatings; Dielectric devices; Electrodes; Laboratories; Resonance; Resonant frequency; Stators; Surface charging; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805579