DocumentCode :
3047229
Title :
Passivated Electrode Actuator with Stable Resonance Amplitude
Author :
Bahl, G. ; Walmsley, R.G. ; DeMartini, B.E. ; Turner, K.L. ; Hartwell, P.G.
Author_Institution :
Stanford Univ., Stanford, CA
fYear :
2009
fDate :
25-29 Jan. 2009
Firstpage :
1099
Lastpage :
1102
Abstract :
In this paper we demonstrate how parametric resonant excitation of a surface drive actuator with dielectric coated electrodes makes the response amplitude independent of the driving force. This behavior can be beneficially utilized to maintain constant excitation amplitude in spite of time-varying charge screening on dielectric passivated electrodes and the associated actuation force decay. Such operation makes the device suitable for applications where constant amplitude operation is critical, such as driving vibratory rate gyroscopes.
Keywords :
electric actuators; electrodes; passivation; actuation force decay; dielectric coated electrodes; driving vibratory rate gyroscopes; parametric resonant excitation; passivated electrode actuator; stable resonance amplitude; surface drive actuator; time-varying charge screening; Actuators; Coatings; Dielectric devices; Electrodes; Laboratories; Resonance; Resonant frequency; Stators; Surface charging; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
ISSN :
1084-6999
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2009.4805579
Filename :
4805579
Link To Document :
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