DocumentCode
3047562
Title
Horizontally-Aligned Single-Walled Carbon Nanotubes on Sapphire: Growth Mechanism and Characterization
Author
Ago, H. ; Ishigami, N. ; Imamoto, K. ; Suzuki, T. ; Ikeda, Ken-ichi ; Tsuji, M. ; Ikuta, T. ; Takahashi, K.
Author_Institution
Kyushu Univ., Fukuoka
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
38
Lastpage
39
Abstract
In this paper, the authors reported the recent progress on the growth and characterization of aligned single-walled carbon nanotubes (SWNTs) on sapphire substrate. They introduced the position-and direction-controlled growth of SWNTs on a sapphire substrate and showed the highly-aligned SWNTs grown from the Fe-based wet catalyst patterned with the aid of an electron beam lithography technique. The catalyst patterning was found to give much better alignment than those grown on the homogeneously deposited catalyst. This is because the non-patterned area of the sapphire is kept clean without the catalyst contamination. To monitor the growth period chemical vapor deposition (CVD) is used with the combination of Raman mapping measurements.
Keywords
Raman spectra; carbon nanotubes; catalysis; catalysts; chemical vapour deposition; electron beam lithography; sapphire; Al2O3Jk; C; Raman mapping; chemical vapor deposition; electron beam lithography; homogeneously deposited catalyst; horizontally-aligned single-walled carbon nanotubes; iron-based wet catalyst patterning; position-and direction-controlled growth; sapphire substrate; Carbon nanotubes; Chemical industry; Chemical technology; Chemical vapor deposition; Chemistry; Electrons; FETs; Organic materials; Pollution measurement; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location
Kyoto
Print_ISBN
978-4-9902472-4-9
Type
conf
DOI
10.1109/IMNC.2007.4456093
Filename
4456093
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