• DocumentCode
    3047562
  • Title

    Horizontally-Aligned Single-Walled Carbon Nanotubes on Sapphire: Growth Mechanism and Characterization

  • Author

    Ago, H. ; Ishigami, N. ; Imamoto, K. ; Suzuki, T. ; Ikeda, Ken-ichi ; Tsuji, M. ; Ikuta, T. ; Takahashi, K.

  • Author_Institution
    Kyushu Univ., Fukuoka
  • fYear
    2007
  • fDate
    5-8 Nov. 2007
  • Firstpage
    38
  • Lastpage
    39
  • Abstract
    In this paper, the authors reported the recent progress on the growth and characterization of aligned single-walled carbon nanotubes (SWNTs) on sapphire substrate. They introduced the position-and direction-controlled growth of SWNTs on a sapphire substrate and showed the highly-aligned SWNTs grown from the Fe-based wet catalyst patterned with the aid of an electron beam lithography technique. The catalyst patterning was found to give much better alignment than those grown on the homogeneously deposited catalyst. This is because the non-patterned area of the sapphire is kept clean without the catalyst contamination. To monitor the growth period chemical vapor deposition (CVD) is used with the combination of Raman mapping measurements.
  • Keywords
    Raman spectra; carbon nanotubes; catalysis; catalysts; chemical vapour deposition; electron beam lithography; sapphire; Al2O3Jk; C; Raman mapping; chemical vapor deposition; electron beam lithography; homogeneously deposited catalyst; horizontally-aligned single-walled carbon nanotubes; iron-based wet catalyst patterning; position-and direction-controlled growth; sapphire substrate; Carbon nanotubes; Chemical industry; Chemical technology; Chemical vapor deposition; Chemistry; Electrons; FETs; Organic materials; Pollution measurement; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology, 2007 Digest of papers
  • Conference_Location
    Kyoto
  • Print_ISBN
    978-4-9902472-4-9
  • Type

    conf

  • DOI
    10.1109/IMNC.2007.4456093
  • Filename
    4456093