Title :
Analysis of charging phenomena of polymer films in scanning electron microscopy
Author :
Morimoto, K. ; Yasuda, M. ; Tanaka, Y. ; Watanabe, R. ; Kawata, H. ; Hirai, Y.
Author_Institution :
Osaka Prefecture Univ., Sakai
Abstract :
A scanning electron microscope observation is indispensable in the evaluation of the fabricated micro-and nano-structure.In the present work, we study the charge distribution in PMMA films under EB irradiation with both the experiment and the numerical simulation. In the numerical simulation, the initial distribution of the deposited charge is calculated with the Monte Carlo simulation. It is shown that the EBIC plays a dominant role in the charge deposition in polymer films under EB irradiation.
Keywords :
Monte Carlo methods; electron beam effects; polymer films; scanning electron microscopy; static electrification; surface charging; Monte Carlo simulation; charge distribution; electron beam irradiation; polymer films; scanning electron microscopy; Electrodes; Electron beams; Mechanical systems; Modeling; Numerical simulation; Physics; Poisson equations; Polymer films; Scanning electron microscopy; Systems engineering and theory;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456099
