Title :
Lithography using focused high-energy proton beam for fabrication of high-aspect-ratio microstructures
Author :
Nishikawa, H. ; Furuta, Y. ; Uchiya, N. ; Haga, J. ; Oikawa, M. ; Satoh, T. ; Ishii, Y. ; Kamiya, T.
Author_Institution :
Shibaura Inst. of Technol., Tokyo
Abstract :
This report demonstrates the three-dimensional fabrication capability of the proton beam writing (PBW) method. Recent activities of PBW in view of applications for MEMS and biosensors are also discussed.
Keywords :
biosensors; ion beam lithography; micromechanical devices; proton beams; MEMS; biosensors; focused proton beam; high-aspect-ratio microstructures; high-energy proton beam; lithography; microstructure fabrication; proton beam writing; three-dimensional fabrication; Fabrication; Lithography; Micromachining; Micromechanical devices; Microstructure; Particle beams; Protons; Resists; Scanning electron microscopy; Writing;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456107
