Title :
Effect of Annealing and Electron Irradiation on Young´s Modulus of Amorphous Carbon Pillars Grown by FIB-CVD
Author :
Ueki, Ryuichi ; Fujita, Jun-ichi ; Ichihashi, Toshinari ; Kaito, Takashi ; Matsui, Shinji
Author_Institution :
CREST JST, Saitama
Abstract :
The paper reports on the effect of vacuum annealing and and electron shower irradiation on the Young´s modulus of amorphous carbon pillars grown by focused-ion-beam-induced chemical vapor deposition, particularly at low acceleration voltages. TEM image revealed that many fine pores, were formed in the pillars after annealing at 600degC. It was shown that low-energy electron irradiation, is effective in increasing the Young´s modulus of the pillar.
Keywords :
Young´s modulus; amorphous state; annealing; bending; carbon; chemical vapour deposition; elasticity; electron beam effects; focused ion beam technology; ion beam effects; transmission electron microscopy; C; FIB-CVD; Ga ion beam; Young´s modulus; amorphous carbon pillars; annealing; elastic double structure; electron irradiation; flexibility; focused-ion-beam-induced chemical vapor deposition; mechanical bending; nanomechanical components; pores; temperature 600 degC; transmission electron microscopy; Acceleration; Amorphous materials; Annealing; Chemical technology; Electron beams; Laboratories; Low voltage; National electric code; Physics; Plasma applications;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456157
