Title :
Localized deposition of metallic molybdenum particles in ambient air using atmospheric-pressure microplasma
Author :
Shimizu, Yoshiki ; Koga, Kenji ; Sasaki, Takeshi ; Mariotti, Davide ; Terashima, Kazuo ; Koshizaki, Naoto
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Ibaraki
Abstract :
The authors report the details of the deposition process and the unique structure of metallic Mo particles obtained under specific conditions. Results indicated that the surface of the as-deposited particles was oxidized, but the inside of the deposit is mostly metallic Mo. The microstructure of the star-shaped Mo particles was characterized with TEM and TED. The analysis of the complicated TED pattern indicated that the star-shaped Mo particles are five-fold symmetrical multiply twinned particle.
Keywords :
molybdenum; plasma materials processing; transmission electron microscopy; twin boundaries; Mo; TED pattern; TEM; atmospheric-pressure microplasma; five-fold symmetrical multiply twinned particle; localized deposition; metallic molybdenum particles; microstructure; star-shaped Mo particles; Circuits; Materials science and technology; Metals industry; Nanotechnology; Optical microscopy; Oxygen; Raw materials; Scanning electron microscopy; Transmission electron microscopy; Wire;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456160
