Title :
Development of focused-ion-beam (FIB) machining systems for fabricating 3-D micro- and nano- structures
Author :
Kim, Sang-Jae ; Iwasaki, Koji
Author_Institution :
Cheju Nat. Univ., Cheju
Abstract :
This study has developed a three-dimensional (3D) focused-ion-beam (FIB) etching system and a method for machining 3D sensor structures. The FIB etching equipment enables precision cuts to be made with great flexibility for micro- and nano-structure on thin films and single crystals. Hence, the FIB etching system offers a variety of new applications in the area of imaging and precision micro-machining.
Keywords :
focused ion beam technology; micromachining; microsensors; nanotechnology; sputter etching; 3D sensor structures; etching equipment; focused-ion-beam machining; imaging applications; microstructure fabrication; nanostructure fabrication; precision cuts; precision micromachining; single crystals; thin films; Crystals; Etching; Fabrication; Focusing; Instruments; Machining; Nanostructures; Sensor systems; Transistors; Tunneling;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456202
