Title :
The complex mechanisms of Ion Beam Induced Deposition
Author :
Chen, Ping ; Alkemade, Paul F A ; Salemink, Huub W.M.
Author_Institution :
Delft Univ. of Technol., Delft
Abstract :
In this paper, Ion Beam Induced Deposition (IBID) mechanisms for nanostructure growth are investigated in terms of the contribution of secondary atoms, secondary electrons, and primary ions.
Keywords :
ion beam assisted deposition; nanotechnology; ion beam induced deposition; nanostructure growth; primary ions; secondary atoms; secondary electrons; Atomic layer deposition; Atomic measurements; Electron beams; Ion beams; Milling; Nanostructures; Scanning electron microscopy; Shape; Sputtering; Switches;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456203
