Title :
Evaluation of Resolution for Free-Space-Wiring Fabricated by FIB-CVD
Author :
Minari, C. ; Kometani, R. ; Nakamatsu, K. ; Kanda, K. ; Haruyama, Y. ; Kaito, T. ; Matsui, S.
Author_Institution :
Hyogo Univ., Hyogo
Abstract :
Focused ion beam chemical vapor deposition is used to fabricate diamond like carbon (DLC) nanostructures on silicon substrate using phenanthrene gas source at an acceleration voltage of 30 kV. Observations show decreasing DLC linewidth with increasing ion beam scan speed. This is attributed to the Gaussian profile of Ga+ ion beam.
Keywords :
chemical vapour deposition; diamond-like carbon; focused ion beam technology; ion beam effects; nanostructured materials; C; DLC; FIB-CVD; Gaussian profile; Si; diamond like carbon nanostructures; focused ion beam chemical vapor deposition; free-space wiring; phenanthrene gas source; silicon substrate; voltage 30 kV; Acceleration; Chemical technology; Diamond-like carbon; Ion beams; Nanotechnology; Optical device fabrication; Optical devices; Tail; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456204
