Title :
Fundamental investigation on transparent replicated mold using an organic-inorganic hybrid material
Author :
Washiya, R. ; Ando, Takehiro ; Ohkubo, H. ; Kitano, N. ; Shiota, T. ; Miyauchi, A.
Author_Institution :
Hitachi Ltd., Hitachi
Abstract :
This paper investigates a replication process using the organic-inorganic hybrid material. The condition of heat treatment was determined on the basis of the hardness and transmission measurements. 100 repeated imprints were demonstrated using the replicated mold and achieved good fidelity.
Keywords :
moulding; organic-inorganic hybrid materials; replica techniques; soft lithography; fidelity; hardness; heat treatment; organic-inorganic hybrid material; replication process; transparent mold; Communication cables; Costs; Glass; Heat treatment; Laboratories; Nanostructures; Organic inorganic hybrid materials; Polymers; Substrates; Wavelength measurement;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456219
