Title :
Fabrication of nano-patterns composed by metal nanoparticles with photo-nanoimprint
Author :
Kuwahara, Y. ; Morita, M. ; Yoshimori, K. ; Kumamaru, K. ; Endoh, H. ; Iwanaga, T. ; Nagami, T. ; Sawada, T. ; Sasaki, M. ; Goto, M. ; Shosenji, H.
Author_Institution :
Kumamoto Univ., Kumamoto
Abstract :
Nanopatterns of alkanethiol-capped gold nanoparticles are fabricated on photocurable polymer surface using a photo-nanoimprint method. The surface morphology of the nanopattern is observed by scanning electron microscopy and transmission electron microscopy. Spherical gold nanoparticles with a 3.5 nm average diameter and 500 nm line width is obtained.
Keywords :
gold; nanolithography; nanoparticles; nanopatterning; photolithography; scanning electron microscopy; surface morphology; transmission electron microscopy; Au; alkanethiol-capped gold nanoparticles; metal nanoparticles; nanopatterns; photocurable polymer; photonanoimprint; scanning electron microscopy; spherical gold nanoparticles; surface morphology; transmission electron microscopy; Biochemistry; Chemical technology; Chemistry; Fabrication; Gold; Nanoparticles; Polymers; Scanning electron microscopy; Surface morphology; Transmission electron microscopy;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456220
