Title :
Ultrasonic nanoimprint on engineering plastics at room temperature
Author :
Mekaru, H. ; Takahashi, M.
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol., Ibaraki
Abstract :
An ultrasonic nanoimprint lithography (NIL) technology is developed in this study for fabrication of engineering plastics. The ultrasonic vibration generator of the ultrasonic NIL is remodelled for nanoimprinting without heating and cooling of the mold. With the use of the remodelled system, five kinds of engineering plastics (polythylene terephthalate, polymethyl methacrylate, polycarbonate, cyclo olefin polymer, and polyimide) with high throughputs are obtained at room temperature and molding time of only 10 s.
Keywords :
moulding; nanolithography; polymers; soft lithography; cyclo olefin polymer; engineering plastics; molding time; polycarbonate; polyimide; polymethyl methacrylate; polythylene terephthalate; temperature 293 K to 298 K; time 10 s; ultrasonic nanoimprint lithography; ultrasonic vibration generator; Cooling; Frequency; Heating; Magnetostriction; Nanolithography; Piezoelectric actuators; Plastics; Polyimides; Temperature; Throughput;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456223
