DocumentCode
3049936
Title
Study of process time on polymer characteristics in thermal NIL
Author
Shibata, M. ; Tanabe, T. ; Kawata, H. ; Hirai, Y.
Author_Institution
Osaka Pref. Univ., Osaka
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
320
Lastpage
321
Abstract
The aim of the paper is to study the dependence of the process time on the resist properties in experimentally and predict required process time for various molecular weights in PMMA. The deformation process time in thermal NIL is predicted based on experimental study in PMMA for various molecular weights and process temperature based on experimental study. These results are extraordinary useful in designing process conditions and polymer properties for rapid thermal NIL.
Keywords
deformation; nanolithography; polymer solutions; soft lithography; viscosity; PMMA; deformation; molecular weights; polymer properties; rapid thermal NIL; resist; viscosity; Filling; Physics; Polymers; Process design; Rapid thermal processing; Resists; Temperature; Time measurement; Viscosity; deformation time; polymer; thermal nanoimprint; viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location
Kyoto
Print_ISBN
978-4-9902472-4-9
Type
conf
DOI
10.1109/IMNC.2007.4456233
Filename
4456233
Link To Document