Molecular Dynamics Study of Nanoimprint Lithography for Glass Material

MD simulation of the glass forming process with NIL is performed to elucidate the deformation mechanismof the glass material during NIL. The atomic and molecular behavior and interaction, such as viscous flow of the glass and adhesion between the mold and glass, are taken into account. The transition of the applied stress to the mold during mold press, rest and release are comprehensively examined. Such knowledges are beyond the conventional continuum mechanics approach.