Title :
Proposal of a Novel Liquid Flow Actuator for Lab-on-chips Operated by Surface Acoustic Wave
Author :
Saiki, T. ; Okada, K. ; Utsumi, Y.
Author_Institution :
Hyogo Pref. Inst. of Tech., Kobe
Abstract :
In this paper, a novel surface acoustic wave (SAW) continuous liquid flow actuator is described, its fabrication method and the liquid flow characteristics are also discussed.
Keywords :
lab-on-a-chip; microactuators; microfluidics; surface acoustic wave devices; fabrication method; lab-on-chips; liquid flow actuator; liquid flow characteristics; micro total analysis systems; surface acoustic wave; Acoustic waves; Actuators; Chromium; Electrodes; Fabrication; Fluid flow; Proposals; Surface acoustic wave devices; Surface acoustic waves; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456239
