• DocumentCode
    3050024
  • Title

    Fabrication of Stainless Steel Mold using Electro Chemical Fabrication (ECF) method for Microfluidic Biochip

  • Author

    Cho, Min-Soo ; Lim, Hyun-Woo ; Lee, Carodine Sunyong ; Cho, Byung-Ki ; Cho, Young-sik ; Park, Jin-Goo

  • Author_Institution
    Hanyang Univ., Ansan
  • fYear
    2007
  • fDate
    5-8 Nov. 2007
  • Firstpage
    334
  • Lastpage
    335
  • Abstract
    In this paper, SUS mold was fabricated using both ECF method and FeCl3 wet etching. The ECF mold showed the surface roughness values much better than that for FeCl3 etched mold. Therefore, SUS mold was successfully fabricated for the first time in micro-scale and multi-step patterns. Plastic replica was fabricated successfully using the metal mold.
  • Keywords
    bioMEMS; electrochemistry; etching; injection moulding; microfluidics; stainless steel; surface roughness; ECF; FeCl3 wet etching; FeCrCJk; electrochemical fabrication method; injection molding; microfluidic biochip; microscale patterns; plastic replica; stainless steel mold; surface roughness; Biological materials; Chemicals; Injection molding; Microfluidics; Optical device fabrication; Plastics; Rough surfaces; Steel; Surface roughness; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology, 2007 Digest of papers
  • Conference_Location
    Kyoto
  • Print_ISBN
    978-4-9902472-4-9
  • Type

    conf

  • DOI
    10.1109/IMNC.2007.4456240
  • Filename
    4456240
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3050024