DocumentCode :
3050024
Title :
Fabrication of Stainless Steel Mold using Electro Chemical Fabrication (ECF) method for Microfluidic Biochip
Author :
Cho, Min-Soo ; Lim, Hyun-Woo ; Lee, Carodine Sunyong ; Cho, Byung-Ki ; Cho, Young-sik ; Park, Jin-Goo
Author_Institution :
Hanyang Univ., Ansan
fYear :
2007
fDate :
5-8 Nov. 2007
Firstpage :
334
Lastpage :
335
Abstract :
In this paper, SUS mold was fabricated using both ECF method and FeCl3 wet etching. The ECF mold showed the surface roughness values much better than that for FeCl3 etched mold. Therefore, SUS mold was successfully fabricated for the first time in micro-scale and multi-step patterns. Plastic replica was fabricated successfully using the metal mold.
Keywords :
bioMEMS; electrochemistry; etching; injection moulding; microfluidics; stainless steel; surface roughness; ECF; FeCl3 wet etching; FeCrCJk; electrochemical fabrication method; injection molding; microfluidic biochip; microscale patterns; plastic replica; stainless steel mold; surface roughness; Biological materials; Chemicals; Injection molding; Microfluidics; Optical device fabrication; Plastics; Rough surfaces; Steel; Surface roughness; Wet etching;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
Type :
conf
DOI :
10.1109/IMNC.2007.4456240
Filename :
4456240
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3050024
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