DocumentCode
3050116
Title
Fabrication of a Micro-Fluidic Filter/Channel using MEMS Technology
Author
Eun, Duk-Soo ; Kong, Dae-Young ; Yoo, Hyun-Jun ; Hong, Young-Myong ; Jang, Jong-Min ; Choi, Pyung ; Seong Ho Kong ; Shin, Jang-Kyoo ; Lee, Jong-Hyun ; Yu, In-Sik
Author_Institution
Kyungpook Nat. Univ., Daegu
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
346
Lastpage
347
Abstract
This paper investigates the design and fabrication of a micro-fluidic filter/channel using different methods. The micro-fluidic filter is fabricated by anodic reaction with (110) wafer. The most ideal micro-fluidic channel is fabricated by microblaster process, and HNA solution etching. It is expected that proposed micro-fluidic filter/channel would likely be applied micro-fluidic systems that could classify necessary materials to react and measure.
Keywords
anodisation; etching; microchannel flow; microfiltration; (110) wafer; anodic reaction; etching; microblaster; microfluidic channel; microfluidic filter; Biological materials; Computer science; Etching; Fabrication; Filters; Immune system; Microfluidics; Micromechanical devices; Organic materials; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location
Kyoto
Print_ISBN
978-4-9902472-4-9
Type
conf
DOI
10.1109/IMNC.2007.4456246
Filename
4456246
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