Title :
Fabrication of a Micro-Fluidic Filter/Channel using MEMS Technology
Author :
Eun, Duk-Soo ; Kong, Dae-Young ; Yoo, Hyun-Jun ; Hong, Young-Myong ; Jang, Jong-Min ; Choi, Pyung ; Seong Ho Kong ; Shin, Jang-Kyoo ; Lee, Jong-Hyun ; Yu, In-Sik
Author_Institution :
Kyungpook Nat. Univ., Daegu
Abstract :
This paper investigates the design and fabrication of a micro-fluidic filter/channel using different methods. The micro-fluidic filter is fabricated by anodic reaction with (110) wafer. The most ideal micro-fluidic channel is fabricated by microblaster process, and HNA solution etching. It is expected that proposed micro-fluidic filter/channel would likely be applied micro-fluidic systems that could classify necessary materials to react and measure.
Keywords :
anodisation; etching; microchannel flow; microfiltration; (110) wafer; anodic reaction; etching; microblaster; microfluidic channel; microfluidic filter; Biological materials; Computer science; Etching; Fabrication; Filters; Immune system; Microfluidics; Micromechanical devices; Organic materials; Silicon;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456246
