Title :
Integration of Ag/AgCl reference electrode with MOSFET-type biosensor
Author :
Choi, Ho-Jin ; Shin, Jang-Kyoo ; Choi, Pyung ; Lyu, Hong-Kun ; Sawada, Kazuaki ; Ishida, Makoto
Author_Institution :
Kyungpook Nat. Univ., Daegu
Abstract :
In this study, a CMOS process-compatible MOSFET-type biosensor with a built-in Ag/AgCI thin film reference electrode have been fabricated on the same chip. Au was used as the gate metal of the MOSFET-type biosensor in order to immobilize biomolecules. Electrical characteristics of the MOSFET-type biosensor is quite stable and similar to the characteristics of the biosensor with the conventional Ag/AgCI glass electrode. Therefore, it is concluded that the Ag/AgCI thin film reference electrode might replace the voluminous Ag/AgCI glass reference electrode for realization of miniature biosensors and micro total analysis systems.
Keywords :
MOSFET; biosensors; electrodes; gold; metallic thin films; molecular biophysics; silver; silver compounds; Ag-AgCl-Au; CMOS process; MOSFET-type biosensor; biomolecule immobilization; built-in thin film reference electrode; electrical properties; gate metal; Atom optics; Atomic measurements; Bioinformatics; Biosensors; Electrodes; Genomics; Glass; Gold; Molecular biophysics; Transistors;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456249
